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In this work a digitally controlled dc-dc voltage converter circuit aimed at providing on-chip high voltage for MEMS switch actuation is developed. The chip including an analog voltage converter and a digital controller is fabricated in a 0.7 μm CMOS high voltage/low voltage technology and occupies 11.84 mm2 Si area. A maximum voltage of 32 V is attained in the realized prototype but higher levels are possible with modified converter designs. Multilevel driving voltage waveforms are demonstrated with successful configuration of the voltage level and time of selected intervals.