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The reactors using discharge is one of major applications of pulsed power technology. The pulsed power discharges to achieve a higher efficiency than conventional methods mainly consist of streamer discharges. It has been reported that a higher efficiency is feasible owing to control of arc discharge when the pulse width of pulsed power becomes shorter. Then, we have developed a pulsed power generator with nanosecond pulse width to apply the ozone production. Although a small improvement of efficiency was obtained in applying the nanosecond pulsed power, we encountered the other problems. The one is a difficulty to optimize the reactor for reaction process and the other is a difficulty of matching between the generator and the reactor. According to the results obtained in the experiment of ozone production using the nanosecond pulsed power, the problems are considered. An advantage of parallelizing thinner reactors is concluded.