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In this paper, modified logical effort (MLE) technique is proposed to provide delay estimation for CMOS gates. The model accounts for the behavior of series-connected MOSFET structure (SCMS), the input transition time, and internodal charges. Also, the model takes into account deep submicron effects, such as mobility degradation and velocity saturation. This model exhibits good accuracy when compared with Spectre simulations based on BSIM3v3 model. Using UMC's 0.13-μm and TSMC's 0.18-μm technologies, the model has an average error of 4.5% and a maximum error of 15%.