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An ultra-small high-performance silicon microphone using single-crystalline silicon

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9 Author(s)
Tajima, T. ; NHK Sci. & Tech. Res. Labs., Tokyo, Japan ; Iguchi, Y. ; Goto, M. ; Ono, K.
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We have developed a prototype of an ultra-small high-performance condenser-type silicon microphone with a unique semiconductor microfabrication technology using extremely high-tensile-strength single-crystalline silicon, having both mass producibility and outstanding reliability. The microphone we fabricated has such acoustic characteristics as a wide frequency range of 30 Hz to 20 kHz, sensitivity of over -42 dB, and wide dynamic range of 134 dBSPL, sufficient for broadcasting and consumer use.

Published in:

Consumer Electronics, 2005. ICCE. 2005 Digest of Technical Papers. International Conference on

Date of Conference:

8-12 Jan. 2005