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A reliable remote RF powering system is developed for industrial wireless MEMS strain sensing applications. The prototype system is insensitive to mechanical rotation and produces a stable DC voltage of 2.8 V with a 2 mA current supply capability from a 50 MHz RF power source with a power conversion efficiency of 11%. An improved efficiency can be expected with an optimized power transmitter design. The CMOS power converter electronics are fabricated in a 1.5 μm CMOS process occupying an area of approximately 1 mm × 1 mm. The achieved DC power is adequate for supplying a high-performance wireless MEMS strain sensing system.