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A compact spectrometer based on a micromachined torsional mirror device

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5 Author(s)
Kenda, A. ; Carinthian Tech Res. AG, Villach, Austria ; Scherf, W. ; Hauser, R. ; Gruger, H.
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We describe a spectrometer employing a microelectromechanical system (MEMS). A torsional micromirror device, which was originally designed for laser scanner applications, has been modified to act as a diffraction grating in a Czerny-Turner setup. This spectrometer system combines the working principle of a scanning monochromator with the compactness of a microsystem. The micromirror device is operated in a harmonic scanning mode at a resonant frequency of 500 Hz, enabling the system to acquire a spectrum per half cycle in one millisecond. The spectra of a calibration source in the visible and near-infrared spectral range as well as simulations concerning the optical system demonstrate the performance of the spectrometer.

Published in:

Sensors, 2004. Proceedings of IEEE

Date of Conference:

24-27 Oct. 2004