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Fabrication and design of a heat transfer micro channel system at low temperature process by MEMS technique

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4 Author(s)
Liu, C.W. ; Nat. Nano Device Lab., Hsin-Chu, Taiwan ; Chie Gau ; Yang, C.S. ; Dai, B.T.

The paper describes a low temperature fabrication technique for a micro channel system in which a low thermal conductivity material can be used to form the channel wall. This channel can provide a uniform heat flux boundary condition and good insulation on the wall to prevent heat loss from the channel to the outside ambient. Therefore, detailed micro-scale flow and heat transfer process and information along the channel can be studied. Design considerations and fabrication techniques involved in this processes are discussed. A final measurement for the validation of the heaters and the sensors fabricated and a study of the heat transfer coefficient distributions inside the micro channel are presented.

Published in:

Sensors, 2004. Proceedings of IEEE

Date of Conference:

24-27 Oct. 2004