By Topic

Advanced chemical microsensor systems in CMOS technology [gas sensors]

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

8 Author(s)
Li, Y. ; Phys. Electron. Lab., Eidgenossische Tech. Hochschule, Zurich, Switzerland ; Vancura, C. ; Barrettino, D. ; Graf, M.
more authors

We report on results achieved with three different chemical microsensor systems featuring three different types of transducers, all of which are monolithically integrated with associated driving and readout circuitry. The capacitive sensor which is sensitive to changes in dielectric properties of the polymer layer upon analyte absorption, and the cantilever which is sensitive to predominantly mass changes, are two polymer-based gas sensors. An on-chip integrated ΣΔ-converter is used to detect the minute capacitance changes of the capacitive sensor. The cantilever is magnetically excited and its vibration is detected using a piezoresistive Wheatstone bridge. Self-oscillation of the cantilever is achieved through monolithic integration of the feedback circuitry. The third transducer is a microhotplate-based gas sensor which relies on the resistance changes of a metal oxide upon gas exposure at an operation temperature of 300-400°C. The ultimate goal is the monolithic integration of all the different transducers with driving and signal-processing electronics and a digital communication interface on the same single chip.

Published in:

Sensors, 2004. Proceedings of IEEE

Date of Conference:

24-27 Oct. 2004