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Micromachined bolometer with single-crystal silicon diode as temperature sensor

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4 Author(s)
Neuzil, P. ; Inst. of Microelectron., Singapore, Singapore ; Yong Liu ; Han-Hua Feng ; Wenjiang Zeng

An infrared-sensitive micromachined bolometer integrated with a single-crystal silicon diode as temperature sensor was designed and fabricated. An island of single-crystal silicon containing the diode underneath the bolometer membrane was centered and thermally isolated from the substrate. Diode temperature sensitivity biased by constant current was found to be -2.6 mVK-1 and bolometer thermal conductivity of 2.0×10-7 WK-1. Due to its negligible self-heating effect, the bolometer could be biased permanently and its output signal integrated for an unlimited time. The utilization of diode-based bolometer as focal plane array basic block is discussed.

Published in:

Electron Device Letters, IEEE  (Volume:26 ,  Issue: 5 )

Date of Publication:

May 2005

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