Cart (Loading....) | Create Account
Close category search window
 

A large-scale Ar plasma source excited by a TM330 mode

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
Tatarova, E. ; Centro de Fisica dos Plasmas, Inst. Superior Tecnico, Lisboa, Portugal ; Dias, F.M. ; Henriques, J. ; Ferreira, C.M.

This paper reports a theoretical and experimental study on the spatial structure of a large-scale, slot-antenna excited plasma source operating in Ar. The overdense plasma (with a plasma frequency ωpl higher than stimulating frequency ω) close to the wave energy source sustained by the TM330 surface mode is analyzed. A self-consistent theoretical model based on a set of coupled equations is developed, which includes the electron Boltzmann equation, the rate balance equations for the most important excited species and charged particles, the gas thermal balance equation, and the wave mode electrodynamic equations. The principal collisional and radiative processes that determine the populations in the Ar(3p54s) and Ar(3p54p) levels are accounted for. The model determines the three-dimensional discharge structure, i.e., the radial, azimuthal and axial variations of the main discharge quantities. An experimental validation of the model predictions is achieved using probe techniques and radiophysics methods. Strong correlations are shown to exist between the density distributions of plasma electrons, positive ions, and electronically excited states of Ar atoms and the electric field intensity distribution in the discharge zone of the plasma source.

Published in:

Plasma Science, IEEE Transactions on  (Volume:33 ,  Issue: 2 )

Date of Publication:

April 2005

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.