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Laser-particle interactions in an RF capacitively coupled dusty plasma

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6 Author(s)
Remy, J. ; Appl. Phys. Dept., Eindhoven Univ. of Technol., Netherlands ; Dingemans, G. ; Sorokin, M. ; Baede, A.H.F.M.
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Laser diagnostic studies of capacitively coupled radio frequency discharges containing silane diluted in argon have received considerable attention in order to understand the dust particles' formation and behavior. The formation mechanism of those macroscopic particulates needs to be clarified to enhance the product control in the surface processing industry. Laser light is scattered from in situ formed particles and is used to track their formation and transport under different plasma conditions. The results show that optical scattering can provide valuable information on the particles' growth and behavior. It also proves to be a good process-monitoring tool.

Published in:

Plasma Science, IEEE Transactions on  (Volume:33 ,  Issue: 2 )

Date of Publication:

Apr 2005

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