Cart (Loading....) | Create Account
Close category search window

Laser-particle interactions in an RF capacitively coupled dusty plasma

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

6 Author(s)
Remy, J. ; Appl. Phys. Dept., Eindhoven Univ. of Technol., Netherlands ; Dingemans, G. ; Sorokin, M. ; Baede, A.H.F.M.
more authors

Laser diagnostic studies of capacitively coupled radio frequency discharges containing silane diluted in argon have received considerable attention in order to understand the dust particles' formation and behavior. The formation mechanism of those macroscopic particulates needs to be clarified to enhance the product control in the surface processing industry. Laser light is scattered from in situ formed particles and is used to track their formation and transport under different plasma conditions. The results show that optical scattering can provide valuable information on the particles' growth and behavior. It also proves to be a good process-monitoring tool.

Published in:

Plasma Science, IEEE Transactions on  (Volume:33 ,  Issue: 2 )

Date of Publication:

Apr 2005

Need Help?

IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.