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Coplanar ac discharges between cylindrical electrodes with a nanoporous alumina dielectric: Modular dielectric barrier plasma devices

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4 Author(s)
Cho, J.H. ; Dept. of Chem., Myongji Univ., Yong-In, South Korea ; Lee, K.-W. ; Park, S.-J. ; Eden, J.G.

Dielectric barrier discharges between coplanar Al rods having an ∼2-μm-thick layer of nanoporous alumina dielectric at the surface have been investigated. Rods 3 mm in diameter, 7 cm in length, and spaced by 5 mm produce stable and intense glow discharges in 50 torr of Ne when pairs of rods are driven by an alternating current (bipolar) waveform for which the peak voltage is ∼460-510 V.

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Plasma Science, IEEE Transactions on  (Volume:33 ,  Issue: 2 )