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Treatment of a perfluorocarbon using nonthermal plasma produced by atmospheric streamer corona discharge

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2 Author(s)
Hayashi, N. ; Dept. of Electr. & Electron. Eng., Saga Univ., Japan ; Satoh, Saburoh

A nonthermal plasma produced by streamer corona discharge at atmospheric pressure was investigated for the treatment of perfluorocarbon gas. The effectiveness of fluorocarbon treatment was investigated using mixture gases of Ar or N with CF4. A maximum decomposition rate of 86% and a maximum energy efficiency of 0.6 g/kWh were achieved using the mixture gas of CF4 (1%) and Ar (99%).

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Plasma Science, IEEE Transactions on  (Volume:33 ,  Issue: 2 )