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Low-loss planar optical waveguides fabricated in SIMOX material

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4 Author(s)
Rickman, A. ; Dept. of Electron. & Electr. Eng., Surrey Univ., Guildford, UK ; Reed, G.T. ; Weiss, B.L. ; Namavar, F.

Planar optical waveguides have been formed in SIMOX structures, and the effect of the thickness of the buried oxide layer on propagation loss hs been studied. Waveguides with a guiding layer thickness of approximately 6 mu m have been measured, and the lowest loss, which is on the order of that of pure silicon, was observed for a buried oxide thickness of 0.4 mu m, at a measurement wavelength of 1.523 mu m.<>

Published in:

Photonics Technology Letters, IEEE  (Volume:4 ,  Issue: 6 )