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High-speed MEMS-based gas chromatography

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4 Author(s)
M. Agah ; Eng. Res. Center for Wireless Integrated MicroSystems, Michigan Univ., Ann Arbor, MI, USA ; G. R. Lambertus ; R. D. Sacks ; K. D. Wise

This paper reports microfabricated silicon-on-glass separation columns for high-speed gas chromatography systems. The columns are 25cm long with on-chip heaters and sensors for pressure and temperature. Programmed with temperature ramps of 10°C/s, the low-mass columns separate eleven-component gaseous mixtures in less than 10s, including simulants for chemical warfare agents.

Published in:

Electron Devices Meeting, 2004. IEDM Technical Digest. IEEE International

Date of Conference:

13-15 Dec. 2004