Referenced Items are not available for this document.
This paper reports microfabricated silicon-on-glass separation columns for high-speed gas chromatography systems. The columns are 25cm long with on-chip heaters and sensors for pressure and temperature. Programmed with temperature ramps of 10°C/s, the low-mass columns separate eleven-component gaseous mixtures in less than 10s, including simulants for chemical warfare agents.
Published in:
Electron Devices Meeting, 2004. IEDM Technical Digest. IEEE International
Date of Conference: 13-15 Dec. 2004
- Page(s):
- 27 - 30
- Print ISBN:
- 0-7803-8684-1
- INSPEC Accession Number:
- 8371561
- Digital Object Identifier :
- 10.1109/IEDM.2004.1419055
- Product Type:
- Conference Publications
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