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This paper reports microfabricated silicon-on-glass separation columns for high-speed gas chromatography systems. The columns are 25cm long with on-chip heaters and sensors for pressure and temperature. Programmed with temperature ramps of 10°C/s, the low-mass columns separate eleven-component gaseous mixtures in less than 10s, including simulants for chemical warfare agents.
Date of Conference: 13-15 Dec. 2004