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The accessibility of inexpensive and powerful computers has allowed true digital holography to be used for industrial inspection using microscopy. This technique allows the capture of a complex image (i.e., one containing magnitude and phase), and the reconstruction of the phase and magnitude information. Digital holograms give a new dimension to texture analysis, since the topology information can be used as an additional way to extract features. This new technique can be used to extend previous work on the image segmentation of patterned wafers for defect detection. The paper presents a comparison between the features obtained using Gabor filtering on complex images under illumination and focus variations.
Image Processing, 2004. ICIP '04. 2004 International Conference on (Volume:1 )
Date of Conference: 24-27 Oct. 2004