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Ammonia sensing probe using shear horizontal surface acoustic wave technique

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5 Author(s)
Chi-Yen Shen ; Dept. of Electr. Eng., I-Shou Univ., Kaohsiung, Taiwan ; Chun-Pu Huang ; Kuo-Chien Hsu ; Jin-Shing Jeng
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This study investigated an improved shear horizontal surface acoustic wave (SH-SAW) ammonia sensor based on L-glutamic acid hydrochloride. In order to satisfy Barkhausen criteria for oscillation and avoid mode hopping, it used coupling of modes (COM) theory to design a SH-SAW resonator. This SH-SAW sensor presented excellent reversibility, sensitivity, and repeatability when ammonia was in the ppb level. According to the signal-to-noise ratio of two, the estimated limit of detection (LOD) is 13.53 ppb.

Published in:

Frequency Control Symposium and Exposition, 2004. Proceedings of the 2004 IEEE International

Date of Conference:

23-27 Aug. 2004

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