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Mechanically-coupled micromechanical resonator arrays for improved phase noise

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2 Author(s)
Seungbae Lee ; Dept. of Electr. Eng. & Comput. Sci., Michigan Univ., Ann Arbor, MI, USA ; Nguyen, C.T.-C.

Reductions in phase noise by more than 26 dB have been obtained over previous micromechanical resonator oscillators by replacing the single resonator normally used in such oscillators with a mechanically coupled array of them to effectively raise the power handling ability of the frequency selective tank by a factor equal to the number of resonators used in the array, and all with virtually no increase in volume or cost, given that all resonators are integrated onto a single die using batch processed MEMS technology. Specifically, a mechanically coupled array of ten 15.4-MHz 40μm×10μm×2μm free-free beams embedded in a positive feedback loop with a single-ended to differential transimpedance sustaining amplifier achieves phase noise of -109 and -133 dBc/Hz at 1 kHz and far-from-carrier offset frequencies, respectively. When divided down to 10 MHz, these effectively correspond to -112 and -136 dBc/Hz, respectively, which represent more than 17 and 26 dB improvements over recently published work with clamped-clamped beam resonator oscillators.

Published in:

Frequency Control Symposium and Exposition, 2004. Proceedings of the 2004 IEEE International

Date of Conference:

23-27 Aug. 2004

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