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Optical properties of epitaxial PLZT thin films fabricated by a sol-gel method

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4 Author(s)
Ishii, Masatoshi ; Fujitsu Ltd., Kanagawa, Japan ; Satoh, K. ; Kato, M. ; Kurihara, Kazuaki

The composition dependence near the morphotropic phase boundary (MPB) composition of refractive index and electric-optic (EO) coefficient of the epitaxial (Pb1-x, Lax)(Zr1-y, Tiy)1-x4/O3 [PLZT] thin films were investigated. PLZT films were fabricated on Nb doped SrTiO3 [Nb-STO] (100) substrates by a sol-gel method. The TE- and TM-mode of optical properties were measured separately. Depending on La content the refractive index were varied up to 2 %. This is adequate for fabrications of waveguide structures. Birefringence became small from 4×10-3 to 1×10-3 as the crystal structure became close to cubic. The EO coefficient of PLZT (9/65/35) thin films was 45 pm/V, and only a small polarization dependence of the EO coefficient was observed. PLZT optical waveguide that was structured changing PLZT compositions was fabricated on Nb-STO substrate. TE- and TM-modes have similar EO coefficients of 41-42 pm/V.

Published in:

Applications of Ferroelectrics, 2004. ISAF-04. 2004 14th IEEE International Symposium on

Date of Conference:

23-27 Aug. 2004