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Propagation characteristics of shear-horizontal-type surface acoustic wave on langasite with Au of Ta2O5 thin film

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3 Author(s)
Kakio, S. ; Interdisciplinary Graduate Sch. of Medicine & Eng., Yamanashi Univ., Kofu, Japan ; Nozawa, M. ; Nakagawa, Y.

The propagation characteristics, mainly the propagation loss and the bulk wave radiation loss of a pure shear-horizontal-type surface acoustic wave on (0°, 0, 90°)-cut langasite with a high-density thin film such as a gold (Au) film or a tantalum pentoxide (Ta2O5) dielectric film, are investigated experimentally. The cut angles θ of 0°, 10° and 20° were chosen because the coupling factor of 1.0% and a zero temperature coefficient of delay (TCD) can both be expected around these cut angles. The experimental results showed that the propagation characteristics, that is the energy-trapping effects of loading with the with the Ta2O5 film, depend on the cut angle. For the Au film, the propagation loss and the bulk wave radiation loss showed relatively small values at θ=10.

Published in:

Ultrasonics Symposium, 2004 IEEE  (Volume:3 )

Date of Conference:

23-27 Aug. 2004