Cart (Loading....) | Create Account
Close category search window
 

Thin film bulk acoustic wave resonator (TFBAR) gas sensor

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

6 Author(s)
Benetti, M. ; Ist. di Acustica O.M.Corbino, CNR, Rome, Italy ; Cannata, D. ; DAmico, A. ; Di Pietrantonio, F.
more authors

A novel electro-acoustic chemical sensor, based on a TFBAR, is presented. The principle of operation is the same as the well known quartz crystal micro-balance, where the frequency of operation is extended from the limit of a few tens of MHz to several GHz. The larger sensor output signals, associated with higher frequency operation, is a condition used to develop devices with improved sensitivity. TFBARs have been implemented on [001] Si wafers, using Si3N4/AlN membranes, obtained by anisotropic chemical etching from the back side of the Si substrate. The performance of the TFBAR sensor has been tested using a thin Pd chemical interactive membrane deposited on the etched side of the membrane and exposed to different concentrations of hydrogen in nitrogen. Time response upon different cycles of H2 adsorption and desorption are reported together with the sensor calibration curve. The operation frequency of the device, in the GHz range, allows it to obtain large responses. The device is robust in construction and miniaturized in size. Time stability, repeatability and sensitivity have been tested and reported.

Published in:

Ultrasonics Symposium, 2004 IEEE  (Volume:3 )

Date of Conference:

23-27 Aug. 2004

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.