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High frequency filters based on piezoelectrically transduced micromechanical resonators

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3 Author(s)
Le Yan ; Dept. of Mech. & Aerosp. Eng., California Univ., Irvine, CA, USA ; Wu, J. ; Tang, W.C.

The paper presents the design, simulation, fabrication, and preliminary test results of a novel micromechanical filter based on coupled piezoelectrically transduced resonators. This is the first report of two identical microfabricated free-free beam resonators coupled with two torsional beams forming a second-order mechanical filter. Piezoelectric transducers from thin-film ZnO were used to drive anti sense resonance, eliminating the need for precision fabrication of nanometer-scale gaps in contrast to electrostatic transduction. Fabrication was done with a four-mask process on SOI wafers with maximum temperature capped at 250°C, allowing post-CMOS integration. Preliminary tests showed a resonant peak of 10.83 MHz and a quality factor of 41 under atmospheric pressure.

Published in:

Ultrasonics Symposium, 2004 IEEE  (Volume:2 )

Date of Conference:

23-27 Aug. 2004