Notification:
We are currently experiencing intermittent issues impacting performance. We apologize for the inconvenience.
By Topic

Spherical φ 1 mm SAW device based on Ball Semiconductor/MEMS technology

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

15 Author(s)
Dongyoun Sim ; Ball Semicond. Inc., Allentown, TX, USA ; Mizukami, A. ; Akao, Shingo ; Satoh, I.
more authors

A ball SAW (surface acoustic wave) device was fabricated on a 1 mm φ single crystal quartz sphere. On the z-axis cylinder, it has multiple roundtrips of more than 190 turns and a long propagation length of 157 mm at 150 MHz of driving frequency and 50 turns roundtrip. Using this device, we realized a hydrogen gas sensor as an application of a ball SAW device. Amplitude and delay time responses were measured under exposure to between 10 ppm and 3% H2 in N2 base gas by using a selective sensing film of 40 nm thick Pd/Ni alloy. The response time was about 30 sec in 3% H2.

Published in:

Ultrasonics Symposium, 2004 IEEE  (Volume:2 )

Date of Conference:

23-27 Aug. 2004