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Spherical φ 1 mm SAW device based on Ball Semiconductor/MEMS technology

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15 Author(s)
Dongyoun Sim ; Ball Semicond. Inc., Allentown, TX, USA ; Mizukami, A. ; Akao, Shingo ; Satoh, I.
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A ball SAW (surface acoustic wave) device was fabricated on a 1 mm φ single crystal quartz sphere. On the z-axis cylinder, it has multiple roundtrips of more than 190 turns and a long propagation length of 157 mm at 150 MHz of driving frequency and 50 turns roundtrip. Using this device, we realized a hydrogen gas sensor as an application of a ball SAW device. Amplitude and delay time responses were measured under exposure to between 10 ppm and 3% H2 in N2 base gas by using a selective sensing film of 40 nm thick Pd/Ni alloy. The response time was about 30 sec in 3% H2.

Published in:

Ultrasonics Symposium, 2004 IEEE  (Volume:2 )

Date of Conference:

23-27 Aug. 2004