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A novel method for the fabrication of high-aspect ratio C-MEMS structures

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4 Author(s)
Chunlei Wang ; Dept. of Mech. & Aerosp. Eng., Univ. of California, Irvine, CA, USA ; Guangyao Jia ; Taherabadi, L.H. ; Madou, Marc J.

A novel fabrication process was developed to create high aspect ratio (>10:1) carbon posts, all-carbon suspended bridges and wires, self-organized bunches of carbon posts, and carbon plates supported by carbon beams. The structures are all made from a two-step pyrolysis process with SU-8 photoresist as the starting material. In this paper we describe the fabrication of these various new C-MEMS structures and detail an important application of the high aspect ratio carbon posts arrays. The carbon post arrays can be reversible charged/discharged with Li ions, an application that may greatly impact the application of C-MEMS in three-dimensional microbatteries. Complex suspended C-MEMS structures, such as wires, plates, ribbons, and self-organized bunches of posts, were built. Methods to accurately and repeatedly fabricate all the above 3-D C-MEMS structures are given.

Published in:

Microelectromechanical Systems, Journal of  (Volume:14 ,  Issue: 2 )