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Piezoelectrically actuated dome-shaped diaphragm micropump

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2 Author(s)
Guo-Hua Feng ; Dept. of Electr. Eng.-Electrophys., Univ. of Southern California, Los Angeles, CA, USA ; Eun Sok Kim

This paper describes a piezoelectric micropump built on a dome-shaped diaphragm with one-way parylene valves. The micropump uses piezoelectric ZnO film (less than 10 μm thick) to actuate a parylene dome diaphragm, which is fabricated with an innovative, IC-compatible process on a silicon substrate. Piezoelectric ZnO film is sputter-deposited on a parylene dome diaphragm with its C-axis oriented perpendicular to the dome surface. Two one-way check valves (made of parylene) are integrated with a piezoelectrically actuated dome diaphragm to form a multi-chip micropump. The fabricated micropump (10×10×1.6 mm3) consumes extremely low power (i.e., 3 mW to pump 3.2 μL/min) and shows negligible leak up to 700 Pa static differential pressure.

Published in:

Journal of Microelectromechanical Systems  (Volume:14 ,  Issue: 2 )