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Improvement of cathode life of pierce gun using for the deposition of MgO protection layer in plasma display

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1 Author(s)
Kuo-Ching Chou ; PDP Panel Manuf. & Technol. Div., Chunghwa Picture Tubes, Taoyuan, Taiwan

To improve the cathode life of pierce gun of evaporator used for deposition of MgO thin film as a protection layer in ac-PDPs, various operation conditions of pierce gun including vacuum pressure, deposition beam current and the erosion depth of cathode resulted from ion bombardment were studied. According to the experimental results, higher pressure and higher beam current results in a shorter cathode life. In addition, by reducing the spot size and deposition beam current through a modified focus lens of pierce gun system, a longer cathode life can be achieved.

Published in:

Vacuum Electron Sources Conference, 2004. Proceedings. IVESC 2004. The 5th International

Date of Conference:

6-10 Sept. 2004