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A standard-television compatible 648×487 pixel Schottky-barrier infrared CCD image sensor

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7 Author(s)
K. Konuma ; NEC Corp.. Kanagawa, Japan ; S. Tohyama ; A. Tanabe ; N. Teranishi
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Describes a 648×487 pixel PtSi Schottky-barrier infrared CCD image sensor. Due to the development of the modified inverted-LOCOS process, which can minimize dead regions, and the two-dopant concentration structure, which achieves both a large charge capability and high transfer efficiency, a 40% fill factor in a 21-μm×21-μm pixel and a 0.1-K noise equivalent temperature difference were obtained

Published in:

IEEE Transactions on Electron Devices  (Volume:39 ,  Issue: 7 )