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In this letter, tunable microcavities have been fabricated to evaluate their tunability in dependence on the membrane thickness. The membrane thickness has been decreased from 615 nm down to a record thickness of 123 nm yielding in a maximum mechanical tunability of 15.15 nm/V2. Furthermore, a three-period λ/4 InP/air-gap high reflective mirror (R > 99.8% at 1.55 μm) with a record wide stopband of more than 1100 nm has been fabricated. These results are achieved thanks to specific metal-organic vapor-phase epitaxy growth parameters.
Date of Publication: April 2005