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Volume determination of a silicon sphere using an improved interferometer with optical frequency tuning

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2 Author(s)
Kuramoto, N. ; Nat. Metrol. Inst. of Japan (NMIJ), Nat. Inst. of Adv. Ind. Sci. & Technol. (AIST), Ibaraki, Japan ; Fujii, K.

In order to obtain accurate volume measurements of 1-kg silicon spheres, improvements have been made to an interferometer equipped with a direct optical frequency tuning system. Diameters of a silicon sphere have been measured by the interferometer with a standard uncertainty of 2.6 nm. Details of the improvements and preliminary results of the volume determination are described.

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Instrumentation and Measurement, IEEE Transactions on  (Volume:54 ,  Issue: 2 )