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Optimized design and process for making a DC voltage reference based on MEMS

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6 Author(s)

A micromechanical moving plate capacitor has been designed and fabricated for use as a dc voltage reference. The reference is based on the characteristic pull-in property of a capacitive microelectromechanical system (MEMS) component. The design is optimized for stability. A new silicon-on-insulator (SOI) process has been developed to manufacture the component. We also report on improved feedback electronics and the latest measurement results.

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Instrumentation and Measurement, IEEE Transactions on  (Volume:54 ,  Issue: 2 )