By Topic

Fabrication of polymer optical waveguides with integrated micromirrors for out-of-plane surface normal optical interconnects

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)

In this communication, the fabrication and characterization results of O/E-PWBs comprising multimode polymer waveguides with optical-I/O-coupling facets are presented. The epoxy-based glycidyl ether derivative of bisphenol-A novolac (SU-8) and its refractive index modified grade (L6100) polymers are used as the optical waveguide core and the cladding, respectively. The waveguides with integrated 45° out-of-plane turning micromirrors are fabricated using ultraviolet (UV) lithography. The surface topography and sloping angle characterization using scanning electron microscopy (SEM) showed that 45-degree nearly rectilinear mirror planes were achieved. Parallel waveguide channels with the total-internal-reflection (TIR) are fabricated as an optical-build-up layer on conventional PWBs for functional evaluation. The waveguide transmission loss of the guides with and without the mirror facets is measured using the cut-hack method.

Published in:

Polymers and Adhesives in Microelectronics and Photonics, 2004. POLYTRONIC 2004. 4th IEEE International Conference on

Date of Conference:

12-15 Sept. 2004