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Yield analysis of optical MEMS assembly Process using a Monte Carlo Simulation technique

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3 Author(s)
Badreldin, T. ; MEMSCAP, Cairo, Egypt ; Saad, T. ; Khalil, D.

We developed a statistical Monte Carlo technique for the performance estimation of optical microelectromechanical systems (MEMS) components taking into account the randomness nature of its assembly. The developed technique is applied on the 2×2 moving mirror optical MEMS switch as a typical example to study its performance under realistic passive-alignment conditions. The obtained results enable us to evaluate the assembly process capability and to analyze the performance sensitivity to different fabrication parameters. This enables us to establish a design for manufacturability technique for the optical MEMS components.

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Lightwave Technology, Journal of  (Volume:23 ,  Issue: 2 )