By Topic

A simple and low-cost fabrication of polymeric vertical microlens using dip method

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

6 Author(s)
Chih-Chao Yang ; Dept. of Electron. Eng., Nat. Tsing Hua Univ., Hsinchu, Taiwan ; Te-Chin Peng ; Yun-Hsun Huang ; Meng-Chyi Wu
more authors

Polymeric vertical microlenses (PVMs) using photoresist material SU-8 are fabricated with a simple and low-cost process that can be easily applied to the microoptical/optoelectronic bench. By virtue of the strong adhesive force and liquid cohesion, the PVMs are formed by hanging the liquid SU-8 on walls by a dip method. Then, in order to enhance the thermal stability and reliability of the PVMs, the lenses are baked and exposed in the ultraviolet light to crosslink the SU-8. To characterize the PVMs, we use a single-mode fiber carrying a 1.55-μm wavelength laser light source and utilize BeamScope P5 to observe the beam convergences. The output beams through the PVMs show a vertical far-field angle of 3.04/spl deg/, as compared to 5.53/spl deg/ of the beam without passing through the lenses.

Published in:

Photonics Technology Letters, IEEE  (Volume:17 ,  Issue: 3 )