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A simple and low-cost fabrication of polymeric vertical microlens using dip method

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6 Author(s)
Yang, Chih-Chao ; Dept. of Electron. Eng., Nat. Tsing Hua Univ., Hsinchu, Taiwan ; Peng, Te-Chin ; Huang, Yun-Hsun ; Meng-Chyi Wu
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Polymeric vertical microlenses (PVMs) using photoresist material SU-8 are fabricated with a simple and low-cost process that can be easily applied to the microoptical/optoelectronic bench. By virtue of the strong adhesive force and liquid cohesion, the PVMs are formed by hanging the liquid SU-8 on walls by a dip method. Then, in order to enhance the thermal stability and reliability of the PVMs, the lenses are baked and exposed in the ultraviolet light to crosslink the SU-8. To characterize the PVMs, we use a single-mode fiber carrying a 1.55-μm wavelength laser light source and utilize BeamScope P5 to observe the beam convergences. The output beams through the PVMs show a vertical far-field angle of 3.04°, as compared to 5.53° of the beam without passing through the lenses.

Published in:

Photonics Technology Letters, IEEE  (Volume:17 ,  Issue: 3 )

Date of Publication:

March 2005

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