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The results achieved with polymer Y-splitters, codirectional couplers, and multimode interference couplers, realized by deep ultraviolet lithography are presented. The devices are designed and fabricated for the 1.55-μm wavelength region and have a waveguide loss of 1 dB/cm. The waveguide width is 7.5 μm. The fiber-chip coupling loss is 0.5 dB per facet. The polarization-dependent loss is <0.15 dB.