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Photonic integrated circuits by DUV-induced modification of polymers

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3 Author(s)
Rabus, D.G. ; Inst. for Microstruct. Technol., Forschungszentrum Karlsruhe GmbH, Germany ; Henzi, P. ; Mohr, J.

The results achieved with polymer Y-splitters, codirectional couplers, and multimode interference couplers, realized by deep ultraviolet lithography are presented. The devices are designed and fabricated for the 1.55-μm wavelength region and have a waveguide loss of 1 dB/cm. The waveguide width is 7.5 μm. The fiber-chip coupling loss is 0.5 dB per facet. The polarization-dependent loss is <0.15 dB.

Published in:

Photonics Technology Letters, IEEE  (Volume:17 ,  Issue: 3 )

Date of Publication:

March 2005

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