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We report the multi-physics analysis results for assembling process of the carbon nanotube (CNT) to the AFM probe using dielectrophoresis. Analysis fields for this include fluid dynamics, electric field, and particle dynamics. We completed the coupled equations for multi-disciplinary regions and simulated the attraction procedure of carbon nanotubes in a dielectric medium under the non-uniform electric fields using FEA (finite element analysis) technique. Finally, the optimum assembling condition for CNT AFM tip was suggested.