Cart (Loading....) | Create Account
Close category search window
 

Measurements with an atomic force microscope using a long travel nanopositioning and nanomeasuring machine

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
Hofmann, N. ; Inst. of Meas.- & Sensor-Technol., Technische Univ. Ilmenau, Poland ; Hausotte, T. ; Jager, G. ; Manske, E.

A nanopositioning and -measuring machine (NMM) was developed at the Institute of Measurement and Sensor Technology. It offers a movement range of 25 mm×25 mm×5 mm with a resolution of 0.1 nm. To use the NMM as an instrument to measure micro- and nanostructures on small objects a commercial atomic force microscope (AFM) was integrated. An ULTRAObjective standard by Surface Imaging Systems Germany was used for this. Extensive measurements were carried out to test the metrological characteristics of the system. Different measuring modes showed a big influence on the achieved results.

Published in:

Nanotechnology, 2004. 4th IEEE Conference on

Date of Conference:

16-19 Aug. 2004

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.