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Ultra-small site temperature sensing by carbon nanotube thermal probes

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9 Author(s)
F. Arai ; Dept. of Micro Syst. Eng., Nagoya Univ., Japan ; C. Ng ; Pou Liu ; Lixin Dong
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We have assembled thermal probes with single carbon nanotubes (CNTs) for sensing temperature distribution in local area. The temperature coefficient of resistance of the thermal probes shows the positive characteristics. The feasibility of the CNT thermal probes for scanning local area temperature is investigated in nanometer order. We have implemented the assembled CNT thermal probes for temperature measurement and calibration of CNT nanoheater, and demonstrated them to be novel temperature sensors.

Published in:

Nanotechnology, 2004. 4th IEEE Conference on

Date of Conference:

16-19 Aug. 2004