On-chip SiGe transmission line measurements and model verification up to 110 GHz

On-chip microstrip transmission lines have been measured on-wafer from below 1 GHz up to 110 GHz. Using different pad de-embedding techniques as well as a technique based on two transmission lines of different length, the characteristic transmission line parameters have been accurately determined. The results are compared against simulation results from an electromagnetic full-wave solution and the parametric IBM model which is available in the technology's design kit.