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Low-loss, high- Delta , single-mode channel waveguides for high-density integrated optical devices

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3 Author(s)
S. Sekine ; NTT Transmission Syst. Labs., Kanagawa, Japan ; K. Shuto ; S. Suzuki

Low-loss, high- Delta , single-mode channel waveguides having cores of SiO2-Ta2O5 mixture film are successfully fabricated using sputtering and reactive ion-beam etching. Propagation loss is less than 0.6 dB/cm, and no bending loss for 500 mu m curvature radius at 1.3 mu m wavelength is achieved for an optical waveguide having a relative index difference of 5.6%.

Published in:

Electronics Letters  (Volume:25 ,  Issue: 23 )