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Floating-patch MEMS antennas on HRS substrate for millimetre-wave applications

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5 Author(s)
Cho, Y.H. ; Sch. of Inf. & Commun. Eng., Mokwon Univ., Daejeon, South Korea ; Ha, M.-L. ; Choi, W. ; Pyo, C.
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Novel floating-patch micro-electro-mechanical system (MEMS) antennas are proposed for millimetre-wave applications. The floating-patch MEMS antennas are fabricated on a high resistivity silicon (HRS) substrate using surface micromachining technology. Simulation and experimental results for reflection coefficients and radiation patterns are presented.

Published in:

Electronics Letters  (Volume:41 ,  Issue: 1 )