Skip to Main Content
We have successfully demonstrated a novel athermal arrayed-waveguide grating (AWG), which is composed of highly TiO2-doped SiO2 glass rib waveguides on a silicon substrate. We found that the wavelength temperature coefficients of the athermal AWG depend not only on the TiO2 concentration but also on the annealing temperature after fabrication. We obtained a center wavelength temperature coefficient of 0.7 pm/°C at a TiO2 concentration of 66 mol% and an annealing temperature of 900°C.
Date of Publication: Feb. 2005