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Athermal arrayed-waveguide grating multi/demultiplexers composed of TiO2--SiO2 waveguides on Si

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4 Author(s)
Hirota, H. ; NTT Photonics Labs., NTT Corp., Kanagawa Pref., Japan ; Itoh, M. ; Oguma, Manabu ; Hibino, Y.

We have successfully demonstrated a novel athermal arrayed-waveguide grating (AWG), which is composed of highly TiO2-doped SiO2 glass rib waveguides on a silicon substrate. We found that the wavelength temperature coefficients of the athermal AWG depend not only on the TiO2 concentration but also on the annealing temperature after fabrication. We obtained a center wavelength temperature coefficient of 0.7 pm/°C at a TiO2 concentration of 66 mol% and an annealing temperature of 900°C.

Published in:

Photonics Technology Letters, IEEE  (Volume:17 ,  Issue: 2 )