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An AFM based nanomanipulation system with 3D nano forces feedback

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7 Author(s)

In the AFM based nanomanipulation, the main problem is the lack of real-time sensory feedback for an operator, which makes the manipulation almiost in the dark and inefficient. For solving this problem, the AFM probe micro cantilever-tip is used not only as an end effector but also as a 3D nano forces sensor for sensing the inter:active nano forces between the AFM probe tip and the object or substrate in nanomanipulation. In addition, for a sample-scanning AFM even with a strain gauge position feedback sensor for x-y close-loop displacement control of sample stage, scanning size error will still be generated, which is destructive to lateral positioning accuracy of AFM probe. For improving probe lateral positioning accuracy, an error compensating method is adopted according to system error quantitative annlysis based on the authors?? previous work. With 3D nano force:s sensing through a hapticlforce device and probe positioning acciuracy improvement, the efficiency and accuracy of nano manipulation can be significantly improved. Experiments are prewnted to verify the effectiveness of the nanomanipulation system.

Published in:

Intelligent Mechatronics and Automation, 2004. Proceedings. 2004 International Conference on

Date of Conference:

26-31 Aug. 2004