By Topic

Time-optimal motion control of piezoelectric actuator: STM application

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

2 Author(s)
Yongkai Xu ; Sch. of Mech. Eng., Purdue Univ., West Lafayette, IN, USA ; Meckl, P.H.

This paper examines the problem of time-optimal motion control in the context of scanning tunneling microscopy (STM) application and hysteresis compensation inherent to PZT actuators. The problem was divided into velocity tracking problem and point-to-point motion problem, and the time-optimal input profile was obtained using the command shaping technique of constrained least-square optimization. The optimal scanning velocity given a specific scanning distance and the effect of sampling rate has also been studied. To further improve the tracking performance, the piezoelectric hysteresis nonlinearity was modeled using the classical Preisach model, and explicitly compensated using the proposed continuous numerical inversion algorithm.

Published in:

American Control Conference, 2004. Proceedings of the 2004  (Volume:5 )

Date of Conference:

June 30 2004-July 2 2004