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A novel hybrid differential-integral approach, based on the transverse wave formulation (TWF) is presented for full-wave investigation of multilayer structures including inhomogeneous layer stacks with arbitrary doping profiles. In combining both the benefits of spatial and spectral resolutions, the TWF offers a natural framework for the implementation of multiresolution and multiscale approaches from physical considerations. The possibility of separating the transverse TE and TM components of the TWF solution is discussed. Original isolation structures based on the oxide deep-trenches technique are proposed and demonstrate significant isolation capability in the context of RF integrated-circuit applications.