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Micro channel fabrication in PMMA substrates using CO2 laser and sacrificial mask process

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7 Author(s)
Guangyi Shi ; Dept. of Mechatronic Eng., Beijing Inst. of Technol., China ; Qiang Huang ; Li, W.J. ; Wenqian Huang
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A novel system for 3D microchannel fabrication based on CO2 laser-micromachining is presented. The system consists of a CO2, laser focusing system and a 3D precision positioning platform. The CO2 laser focusing system can regulate a laser beam which is of high-energy and of micron dimension in beam diameter, and the movement precision of the 3D platform is of micron dimension. The fabrication of 3D microchannel system in PMMA (polymethyl methacrylate) can be realized by controlling the CO2 laser and the platform. A special 'sacrificial mask' process was used to produce translucent channels of micron dimensions with low surface roughness using the developed system. The effectiveness of our developed system is confirmed by the experimental results. Potentially, our developed system can be automated to produce 3D micro channels in PMMA substrates without the requirement for the costly and time-consuming lithography and hot-embossing processes that are needed currently.

Published in:

Information Acquisition, 2004. Proceedings. International Conference on

Date of Conference:

21-25 June 2004