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We have developed a traveling-wave Mach-Zehnder modulator using an n-i-n heterostructure fabricated on an InP substrate. We obtained an extremely small π voltage (Vπ) of 2.2 V, even for a short signal-electrode length of 3 mm. We confirmed that the device has an impedance-matched electrode and operates at 40 Gb/s with a single-ended drive voltage of 2.3 V.
Date of Publication: Jan. 2005