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Influence of van der Waals and Casimir forces on electrostatic torsional actuators

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2 Author(s)
Jian-Gang Guo ; State Key Lab. of Nonlinear Mech., Chinese Acad. of Sci., Beijing, China ; Zhao, Ya-Pu

The influence of van der Waals (vdW) and Casimir forces on the stability of the electrostatic torsional nanoelectromechanical systems (NEMS) actuators is analyzed in the paper. With the consideration of vdW and Casimir effects, the dependence of the critical tilting angle and pull-in voltage on the sizes of structure is investigated. The influence of vdW torque is compared with that of Casimir torque. The modified coefficients of vdW and Casimir torques on the pull-in voltage are, respectively, calculated. When the gap is sufficiently small, pull-in can still take place with arbitrary small angle perturbation because of the action of vdW and Casimir torques even if there is not electrostatic torque. And the critical pull-in gaps for two cases are, respectively, derived.

Published in:

Microelectromechanical Systems, Journal of  (Volume:13 ,  Issue: 6 )

Date of Publication:

Dec. 2004

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