By Topic

Recycling method for used slurry by annealed filtering

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $31
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
Seo, Y.-J. ; Dept. of Electr. & Electron. Eng., Daebul Univ., Chonnam, South Korea ; Kim, N.-H. ; Lee, W.-S.

Abrasive powder was collected and annealed so that it could be used to promote the mechanical strength of reduced abrasion force. Chemical mechanical polishing characteristics between self-developed KOH-based silica abrasive slurry and original slurry were investigated. Experimental results showed comparable removal rate and good planarity with commercial products.

Published in:

Electronics Letters  (Volume:40 ,  Issue: 24 )