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Recycling method for used slurry by annealed filtering

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3 Author(s)
Seo, Y.-J. ; Dept. of Electr. & Electron. Eng., Daebul Univ., Chonnam, South Korea ; Kim, N.-H. ; Lee, W.-S.

Abrasive powder was collected and annealed so that it could be used to promote the mechanical strength of reduced abrasion force. Chemical mechanical polishing characteristics between self-developed KOH-based silica abrasive slurry and original slurry were investigated. Experimental results showed comparable removal rate and good planarity with commercial products.

Published in:

Electronics Letters  (Volume:40 ,  Issue: 24 )

Date of Publication:

25 Nov. 2004

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