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On the relationship between yield and cycle time in semiconductor wafer fabrication

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1 Author(s)
Wein, L.M. ; Sloan Sch. of Manage., MIT, Cambridge, CA, USA

The author derives a relationship between the mean amount of time wafers spend in the fab and the mean production rate of nondefective die, assuming the number of defects per die is a Poisson random variable whose mean varies linearly with the amount of time the wafer spends in the fab

Published in:

Semiconductor Manufacturing, IEEE Transactions on  (Volume:5 ,  Issue: 2 )