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High precision laser micromachining depths by pulsed ultraviolet and mid-UV Nd:YAG laser of sapphire and silicon for microfluidic applications

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2 Author(s)
Tai-Chang Chen ; Dept. of Electr. Eng., Washington Univ., Seattle, WA, USA ; Darling, R.B.

We explore the use of near-UV and mid-UV Nd:YAG laser for rapid micromachining for microfluidic applications. The laser ablation depths and precision on sapphire and silicon have been discussed.

Published in:

Lasers and Electro-Optics, 2004. (CLEO). Conference on  (Volume:2 )

Date of Conference:

16-21 May 2004